Specialty Cleaning
Specialty Cleaning will provide to improving the quality and yield of products by Optimizing Cleaning Technique.
| Method | EDC (Extreme Dry Cleaning) |
CO2 Snow Cleaning |
|---|---|---|
| Overview | Non-Contact Dry Cleaner System | |
| Removal Property | Non-adhesive and floating Particles | Adhesive and organic/inorganic Particles |
| Application | Before and after deposition/cutting process | Wafer Surface Cleaning and Wet Cleaning Replacement |
| Particle removal level | > 0.5um floating Particles | nm size and adhesive Particles |
| Mechanism |  |
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