Specialty Coating
We will create customer value through differentiated chemical and plasma resistance special coating.
| Method | NAD (Novel Advanced Deposition) |
PVD (Physical Vapor Deposition) |
|---|---|---|
| Overview | Differentiated Aerosol Deposition | Sputtering with Chemical Reaction |
| Material | Yttria, Alumina, YAG (Yttrium Aluminum Garnet), etc | |
| Characteristics | Excellent chemical/plasma resistance | |
| Application | Components of the nano-pattern etching tools | |
| Porosity | (Near) Zero | |
| A cross sectional image |  |
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